TY - JOUR AU - Ann Chiaramonti AU - Sten Vollebregt AU - Aric Sanders AU - Alexandra Curtin AU - R. Ishihara AU - David Read C2 - Microscopy and Microanalysis DA - 2014-08-26 LA - en PB - Microscopy and Microanalysis PY - 2014 TI - Reliability of Low Temperature Grown Multi-Wall Carbon Nanotube Bundles Integrated as Vias in Monolithic Three-Dimensional Integrated Circuits ER -