Vladar, A.
, Postek, M.
, Zhang, N.
, Larrabee, R.
, Jones, S.
and Hajdaj, R.
(2001),
Reference Material 8091: New Scanning Electron Microscope Sharpness Standard, Proceedings of SPIE, Metrology, Inspection, and Process Control for Microlithography XV, Neal T. Sullivan, Editor, Santa Clara, CA
(Accessed February 6, 2025)