@conference{188746,
  author = {Andras Vladar and Michael Postek and Nien Zhang and Robert Larrabee and Samuel Jones and Russell Hajdaj},
  title = {Reference Material 8091: New Scanning Electron Microscope Sharpness Standard},
  year = {2001},
  number = {4344},
  month = {2001-08-01},
  publisher = {Proceedings of SPIE, Metrology, Inspection, and Process Control for Microlithography XV, Neal T. Sullivan, Editor, Santa Clara, CA},
  language = {en},
}