A Precision Capacitance Cell for Measurement of Thin Film Out-of-Plane Expansion Part III. Conducting and Semiconducting Materials
Chad R. Snyder, F I. Mopsik
This paper describes the construction, calibration, and use of a precision capacitance-based metrology for the measurement of the thermal and hygrothermal (swelling) expansion of thin films. It is demonstrated that with this version of our capacitance cell, materials ranging in electrical properties from insulator to conductors can be measured. The results of our measurements on p-type <100> oriented single crystal silicon are compared to the recommended standard reference values from the literature and are shown to be in excellent agreement.
IEEE Transactions on Instrumentation and Measurement
capacitance cell, coefficient of thermal expansion (CTE), guarded electrode, highsensitivity displacement, inner layer dielectrics, polymers, thermal expansion, thin films
and Mopsik, F.
A Precision Capacitance Cell for Measurement of Thin Film Out-of-Plane Expansion Part III. Conducting and Semiconducting Materials, IEEE Transactions on Instrumentation and Measurement, [online], https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=852836
(Accessed November 30, 2023)