Lee, V.
, Soles, C.
, Liu, D.
, Bauer, B.
and Wu, W.
(2002),
Pore Size Distributioins in Low-k Dielectric Thin Films from X-ray Porosimetry, Journal of Polymer Science Part B-Polymer Physics, [online], https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=853824
(Accessed December 15, 2024)
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Pore Size Distributioins in Low-k Dielectric Thin Films from X-ray Porosimetry
Published
Author(s)
V. J. Lee, , D W. Liu, ,
Citation
Journal of Polymer Science Part B-Polymer Physics
Volume
40(19)
Pub Type
Journals
Download Paper
Keywords
Dielectric Properties, Electronic Materials, Microstructure, Thermodynamics, Thin Films, low-k dielectric material, porosimetry, porosity, porous thin film, small-angle neutron scattering, x-ray reflectivity
Citation
Issues
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Created December 31, 2001, Updated October 12, 2021