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Pore Size Distributioins in Low-k Dielectric Thin Films from X-ray Porosimetry

Published

Author(s)

V. J. Lee, Christopher Soles, D W. Liu, Barry J. Bauer, Wen-Li Wu
Citation
Journal of Polymer Science Part B-Polymer Physics
Volume
40(19)

Keywords

Dielectric Properties, Electronic Materials, Microstructure, Thermodynamics, Thin Films, low-k dielectric material, porosimetry, porosity, porous thin film, small-angle neutron scattering, x-ray reflectivity

Citation

Lee, V. , Soles, C. , Liu, D. , Bauer, B. and Wu, W. (2002), Pore Size Distributioins in Low-k Dielectric Thin Films from X-ray Porosimetry, Journal of Polymer Science Part B-Polymer Physics, [online], https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=853824 (Accessed April 15, 2024)
Created December 31, 2001, Updated October 12, 2021