TY  - JOUR
AU  - V. Lee
AU  - Christopher Soles
AU  - D Liu
AU  - Barry Bauer
AU  - Wen-Li Wu
C2  - Journal of Polymer Science Part B-Polymer Physics
DA  - 2002-01-01 00:01:00
LA  - en
M1  -  40(19)
PB  - Journal of Polymer Science Part B-Polymer Physics
PY  - 2002
TI  - Pore Size Distributioins in Low-k Dielectric Thin Films from X-ray Porosimetry
UR  - https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=853824
ER  -