@article{835956,
  author = {V. Lee and Christopher Soles and D Liu and Barry Bauer and Wen-Li Wu},
  title = {Pore Size Distributioins in Low-k Dielectric Thin Films from X-ray Porosimetry},
  year = {2002},
  number = { 40(19)},
  month = {2002-01-01 00:01:00},
  publisher = {Journal of Polymer Science Part B-Polymer Physics},
  url = {https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=853824},
  language = {en},
}