Kim, J.
, Ehrman, S.
, Mulholland, G.
and Germer, T.
(2001),
Polarized Light Scattering from Metallic Particles on Silicon Wafers, ed. by A. Duparr {?} and B. Singh, Optical Metrology Roadmap for the Semiconductor, Optical, and Data Storage Industries , San Diego, 1, MD
(Accessed April 18, 2024)
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Polarized Light Scattering from Metallic Particles on Silicon Wafers, ed. by A. Duparr ?} and B. Singh
Published
Author(s)
J H. Kim, S H. Ehrman, G W. Mulholland,
Proceedings Title
Optical Metrology Roadmap for the Semiconductor, Optical, and Data Storage Industries
Conference Dates
August 2, 2001
Conference Location
San Diego, 1, MD
Conference Title
SPIE 4449
Pub Type
Conferences
Citation
Created December 31, 2000, Updated October 12, 2021