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Polarized Light Scattering from Metallic Particles on Silicon Wafers, ed. by A. Duparr ?} and B. Singh

Published

Author(s)

J H. Kim, S H. Ehrman, G W. Mulholland, Thomas Germer
Proceedings Title
Optical Metrology Roadmap for the Semiconductor, Optical, and Data Storage Industries
Conference Dates
August 2, 2001
Conference Location
San Diego, 1, MD
Conference Title
SPIE 4449

Citation

Kim, J. , Ehrman, S. , Mulholland, G. and Germer, T. (2001), Polarized Light Scattering from Metallic Particles on Silicon Wafers, ed. by A. Duparr {?} and B. Singh, Optical Metrology Roadmap for the Semiconductor, Optical, and Data Storage Industries , San Diego, 1, MD (Accessed April 20, 2024)
Created December 31, 2000, Updated October 12, 2021