TY  - CONF
AU  - J Kim
AU  - S Ehrman
AU  - G Mulholland
AU  - Thomas Germer
C2  - Optical Metrology Roadmap for the Semiconductor, Optical, and Data Storage Industries , San Diego, 1, MD
DA  - 2001-01-01 00:01:00
LA  - en
PB  - Optical Metrology Roadmap for the Semiconductor, Optical, and Data Storage Industries , San Diego, 1, MD
PY  - 2001
TI  - Polarized Light Scattering from Metallic Particles on Silicon Wafers, ed. by A. Duparr {?} and B. Singh
ER  -