@conference{806031,
  author = {J Kim and S Ehrman and G Mulholland and Thomas Germer},
  title = {Polarized Light Scattering from Metallic Particles on Silicon Wafers, ed. by A. Duparr {?} and B. Singh},
  year = {2001},
  month = {2001-01-01 00:01:00},
  publisher = {Optical Metrology Roadmap for the Semiconductor, Optical, and Data Storage Industries , San Diego, 1, MD},
  language = {en},
}