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Polarized Light Scattering Measurements of Roughness, Subsurface Defects, Particles, and Dielectric Layers on Silicon Wafers, ed. by F. Obelleiro, J.L. Rodr{iacute}guez, and T. Wriedt

Published

Author(s)

Thomas A. Germer, L Sung
Proceedings Title
4th Conference on Electromagnetic and Light Scattering by Nonspherical Particles: Theory and Applications
Conference Dates
September 20-21, 1999
Conference Location
Vigo, SP
Conference Title
proc. 4th Conference on Electromagnetic and Light Scattering by Nonspherical Particles: Theory and Applications

Citation

Germer, T. and Sung, L. (1999), Polarized Light Scattering Measurements of Roughness, Subsurface Defects, Particles, and Dielectric Layers on Silicon Wafers, ed. by F. Obelleiro, J.L. Rodr{iacute}guez, and T. Wriedt, 4th Conference on Electromagnetic and Light Scattering by Nonspherical Particles: Theory and Applications , Vigo, SP (Accessed June 18, 2024)

Issues

If you have any questions about this publication or are having problems accessing it, please contact reflib@nist.gov.

Created January 1, 1999, Updated February 17, 2017