Germer, T.
and Sung, L.
(1999),
Polarized Light Scattering Measurements of Roughness, Subsurface Defects, Particles, and Dielectric Layers on Silicon Wafers, ed. by F. Obelleiro, J.L. Rodr{iacute}guez, and T. Wriedt, 4th Conference on Electromagnetic and Light Scattering by Nonspherical Particles: Theory and Applications , Vigo, SP
(Accessed December 8, 2023)
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Polarized Light Scattering Measurements of Roughness, Subsurface Defects, Particles, and Dielectric Layers on Silicon Wafers, ed. by F. Obelleiro, J.L. Rodr{iacute}guez, and T. Wriedt
Published
Author(s)
, L Sung
Proceedings Title
4th Conference on Electromagnetic and Light Scattering by Nonspherical Particles: Theory and Applications
Conference Dates
September 20-21, 1999
Conference Location
Vigo, SP
Conference Title
proc. 4th Conference on Electromagnetic and Light Scattering by Nonspherical Particles: Theory and Applications
Pub Type
Conferences
Citation
Created January 1, 1999, Updated February 17, 2017