@conference{125556,
  author = {Thomas Germer and L Sung},
  title = {Polarized Light Scattering Measurements of Roughness, Subsurface Defects, Particles, and Dielectric Layers on Silicon Wafers, ed. by F. Obelleiro, J.L. Rodr{iacute}guez, and T. Wriedt},
  year = {1999},
  month = {1999-01-01},
  publisher = {4th Conference on Electromagnetic and Light Scattering by Nonspherical Particles: Theory and Applications , Vigo, SP},
  language = {en},
}