TY  - CONF
AU  - Thomas Germer
AU  - L Sung
C2  - 4th Conference on Electromagnetic and Light Scattering by Nonspherical Particles: Theory and Applications , Vigo, SP
DA  - 1999-01-01
LA  - en
PB  - 4th Conference on Electromagnetic and Light Scattering by Nonspherical Particles: Theory and Applications , Vigo, SP
PY  - 1999
TI  - Polarized Light Scattering Measurements of Roughness, Subsurface Defects, Particles, and Dielectric Layers on Silicon Wafers, ed. by F. Obelleiro, J.L. Rodr{iacute}guez, and T. Wriedt
ER  -