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PUBLICATIONS

Nanolithography Toolbox:

Published

Author(s)

Robert R. Ilic, Krishna Coimbatore Balram, Daron A. Westly, Marcelo I. Davanco, Karen E. Grutter, Qing Li, Thomas Michels, Christopher H. Ray, Liya Yu, Neal A. Bertrand, Samuel M. Stavis, Vladimir A. Aksyuk, James Alexander A. Liddle, Brian A. Bryce, Nicolae Lobontiu, Yuxiang Liu, Meredith Metzler, Gerald Lopez, David Czaplewski, Leonidas Ocola, Pavel Neuzil, Vojtech Svatos, Slava Krylov, Christopher B. Wallin, Ian J. Gilbert, Kristen A. Dill, Richard J. Kasica, Kartik A. Srinivasan, Gregory Simelgor, Juraj Topolancik
Citation
- NIST HB 160
Report Number
NIST HB 160
Pub Type
NIST Pubs

Download Paper

DOI Link

Citation

Ilic, R. , Coimbatore Balram, K. , Westly, D. , Davanco, M. , Grutter, K. , Li, Q. , Michels, T. , Ray, C. , Yu, L. , Bertrand, N. , Stavis, S. , Aksyuk, V. , Liddle, J. , Bryce, B. , Lobontiu, N. , Liu, Y. , Metzler, M. , Lopez, G. , Czaplewski, D. , Ocola, L. , Neuzil, P. , Svatos, V. , Krylov, S. , Wallin, C. , Gilbert, I. , Dill, K. , Kasica, R. , Srinivasan, K. , Simelgor, G. and Topolancik, J. (2016), Nanolithography Toolbox:, , National Institute of Standards and Technology, Gaithersburg, MD, [online], https://doi.org/10.6028/NIST.HB.160 (Accessed October 13, 2025)

Issues

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Created October 1, 2016, Updated February 19, 2025
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