@misc{1150811, author = {Robert R. Ilic and Krishna Coimbatore Balram and Daron A. Westly and Marcelo I. Davanco and Karen E. Grutter and Qing Li and Thomas Michels and Christopher H. Ray and Liya Yu and Neal A. Bertrand and Samuel M. Stavis and Vladimir A. Aksyuk and James Alexander A. Liddle and Brian A. Bryce and Nicolae Lobontiu and Yuxiang Liu and Meredith Metzler and Gerald Lopez and David Czaplewski and Leonidas Ocola and Pavel Neuzil and Vojtech Svatos and Slava Krylov and Christopher B. Wallin and Ian J. Gilbert and Kristen A. Dill and Richard J. Kasica and Kartik A. Srinivasan and Gregory Simelgor and Juraj Topolancik}, title = {Nanolithography Toolbox:}, year = {2016}, month = {2016-10-01 04:10:00}, publisher = {, National Institute of Standards and Technology, Gaithersburg, MD}, doi = {https://doi.org/10.6028/NIST.HB.160}, language = {en}, }