Skip to main content
U.S. flag

An official website of the United States government

Official websites use .gov
A .gov website belongs to an official government organization in the United States.

Secure .gov websites use HTTPS
A lock ( ) or https:// means you’ve safely connected to the .gov website. Share sensitive information only on official, secure websites.

Nanoelectronics Lithography



Stephen Knight, Vivek Prabhu, John H. Burnett, James Alexander Liddle, Christopher Soles, Alain C. Diebold


This is a compiled chapter that will be included into the Handbook of Nanophysics.
Handbook of Nanophysics
Publisher Info
Taylor & Francis, London, -1


lithography, photoresist, electron beam, nanoimprint, metrology, DUV, EUV, ITRS roadmap


Knight, S. , Prabhu, V. , Burnett, J. , Liddle, J. , Soles, C. and Diebold, A. (2011), Nanoelectronics Lithography, Handbook of Nanophysics, Taylor & Francis, London, -1, [online], (Accessed May 21, 2024)


If you have any questions about this publication or are having problems accessing it, please contact

Created February 28, 2011, Updated October 14, 2021