@inbook{850496,
  author = {Stephen Knight and Vivek Prabhu and John Burnett and James Liddle and Christopher Soles and Alain Diebold},
  title = {Nanoelectronics Lithography},
  year = {2011},
  month = {2011-03-01 00:03:00},
  publisher = {Handbook of Nanophysics, Taylor & Francis, London, -1},
  url = {https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=901888},
  language = {en},
}