TY  - CHAP
AU  - Stephen Knight
AU  - Vivek Prabhu
AU  - John Burnett
AU  - James Liddle
AU  - Christopher Soles
AU  - Alain Diebold
C2  - Handbook of Nanophysics, Taylor & Francis, London, -1
DA  - 2011-03-01 00:03:00
LA  - en
PB  - Handbook of Nanophysics, Taylor & Francis, London, -1
PY  - 2011
TI  - Nanoelectronics Lithography
UR  - https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=901888
ER  -