Villarrubia, J.
(2013),
Modeling Scanning Electron Microscope Measurements with Charging, Frontiers of Characterization and Metrology for Nanoelectronics, Gaithersburg, MD, [online], https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=912857
(Accessed December 14, 2024)
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Modeling Scanning Electron Microscope Measurements with Charging
Published
Author(s)
Proceedings Title
Frontiers of Characterization and Metrology for Nanoelectronics
Conference Dates
March 25-28, 2013
Conference Location
Gaithersburg, MD
Pub Type
Conferences
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Keywords
Charging, contact hole, scanning electron microscopy (SEM), dimensional metrology, mathematical modeling, Monte Carlo simulation
Citation
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If you have any questions about this publication or are having problems accessing it, please contact reflib@nist.gov.
Created April 3, 2013, Updated February 19, 2017