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Modeling Scanning Electron Microscope Measurements with Charging

Published

Author(s)

John S. Villarrubia
Proceedings Title
Frontiers of Characterization and Metrology for Nanoelectronics
Conference Dates
March 25-28, 2013
Conference Location
Gaithersburg, MD

Keywords

Charging, contact hole, scanning electron microscopy (SEM), dimensional metrology, mathematical modeling, Monte Carlo simulation

Citation

Villarrubia, J. (2013), Modeling Scanning Electron Microscope Measurements with Charging, Frontiers of Characterization and Metrology for Nanoelectronics, Gaithersburg, MD, [online], https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=912857 (Accessed February 29, 2024)
Created April 3, 2013, Updated February 19, 2017