TY  - CONF
AU  - John Villarrubia
C2  - Frontiers of Characterization and Metrology for Nanoelectronics, Gaithersburg, MD
DA  - 2013-04-03
LA  - en
PB  - Frontiers of Characterization and Metrology for Nanoelectronics, Gaithersburg, MD
PY  - 2013
TI  - Modeling Scanning Electron Microscope Measurements with Charging
UR  - https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=912857
ER  -