@conference{24081,
  author = {John Villarrubia},
  title = {Modeling Scanning Electron Microscope Measurements with Charging},
  year = {2013},
  month = {2013-04-03},
  publisher = {Frontiers of Characterization and Metrology for Nanoelectronics, Gaithersburg, MD},
  url = {https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=912857},
  language = {en},
}