Cassard, J.
(2001),
MEMS Length and Strain Measurements Using an Optical Interferometer, NIST Interagency/Internal Report (NISTIR), National Institute of Standards and Technology, Gaithersburg, MD, [online], https://doi.org/10.6028/NIST.IR.6779 (Accessed May 16, 2026)
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MEMS Length and Strain Measurements Using an Optical Interferometer
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NIST Interagency/Internal Report (NISTIR) - 6779
Report Number
6779
NIST Pub Series
Pub Type
NIST Pubs
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Created August 21, 2001, Updated January 27, 2020