TY  - GEN
AU  - Janet Cassard
C2  - NIST Interagency/Internal Report (NISTIR), National Institute of Standards and Technology, Gaithersburg, MD
DA  - 2001-08-21
DO  - https://doi.org/10.6028/NIST.IR.6779
LA  - en
PB  - NIST Interagency/Internal Report (NISTIR), National Institute of Standards and Technology, Gaithersburg, MD
PY  - 2001
TI  - MEMS Length and Strain Measurements Using an Optical Interferometer
ER  -