@misc{26781,
  author = {Janet Cassard},
  title = {MEMS Length and Strain Measurements Using an Optical Interferometer},
  year = {2001},
  month = {2001-08-21},
  publisher = {NIST Interagency/Internal Report (NISTIR), National Institute of Standards and Technology, Gaithersburg, MD},
  doi = {https://doi.org/10.6028/NIST.IR.6779},
  language = {en},
}