The MEMS 5-in-1 Reference Material (RM) contains test structures for five standard test methods on one test chip, so companies can compare their in-house measurements taken on the RM with NIST measurements, thereby validating their use of the documentary standard test methods. Example NIST reference values are given for an RM 8096 monitor chip used at NIST for stability studies.
Proceedings Title: International Conference on Microelectronic Test Structures (ICMTS)
Conference Dates: March 19-22, 2012
Conference Location: San Diego, CA
Pub Type: Conferences
ASTM, cantilevers, fixed-fixed beams, interferometry, length measurements, MEMS, residual strain, residual stress, SEMI, RM, step height measurements, strain gradient, stress gradient, test structures, thickness, vibrometry, Young's modulus measurements