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PUBLICATIONS

Measurements of Fracture Strength and Young's Modulus of Surface-Micromachined Polysilicon

Published

Author(s)

David T. Read, Janet M. Cassard
Proceedings Title
Proc. Intl. Soc. for Optical Engineering (SPIE), The International Society for Optical Engineering, Micromachining and Microfabrication II
Volume
2880
Conference Dates
October 14-15, 1996
Conference Location
Austin, TX, USA
Pub Type
Conferences

Citation

Read, D. and Cassard, J. (1996), Measurements of Fracture Strength and Young's Modulus of Surface-Micromachined Polysilicon, Proc. Intl. Soc. for Optical Engineering (SPIE), The International Society for Optical Engineering, Micromachining and Microfabrication II, Austin, TX, USA (Accessed November 3, 2025)

Issues

If you have any questions about this publication or are having problems accessing it, please contact [email protected].

Created December 30, 1996, Updated October 12, 2021
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