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Measurements of Fracture Strength and Young's Modulus of Surface-Micromachined Polysilicon

Published

Author(s)

David T. Read, Janet M. Cassard
Proceedings Title
Proc. Intl. Soc. for Optical Engineering (SPIE), The International Society for Optical Engineering, Micromachining and Microfabrication II
Volume
2880
Conference Dates
October 14-15, 1996
Conference Location
Austin, TX, USA

Citation

Read, D. and Cassard, J. (1996), Measurements of Fracture Strength and Young's Modulus of Surface-Micromachined Polysilicon, Proc. Intl. Soc. for Optical Engineering (SPIE), The International Society for Optical Engineering, Micromachining and Microfabrication II, Austin, TX, USA (Accessed April 20, 2024)
Created December 30, 1996, Updated October 12, 2021