TY  - CONF
AU  - David Read
AU  - Janet Cassard
C2  - Proc. Intl. Soc. for Optical Engineering (SPIE), The International Society for Optical Engineering, Micromachining and Microfabrication II, Austin, TX, USA
DA  - 1996-12-31 00:12:00
LA  - en
M1  - 2880
PB  - Proc. Intl. Soc. for Optical Engineering (SPIE), The International Society for Optical Engineering, Micromachining and Microfabrication II, Austin, TX, USA
PY  - 1996
TI  - Measurements of Fracture Strength and Young's Modulus of Surface-Micromachined Polysilicon
ER  -