@conference{779586,
  author = {David Read and Janet Cassard},
  title = {Measurements of Fracture Strength and Young's Modulus of Surface-Micromachined Polysilicon},
  year = {1996},
  number = {2880},
  month = {1996-12-31 00:12:00},
  publisher = {Proc. Intl. Soc. for Optical Engineering (SPIE), The International Society for Optical Engineering, Micromachining and Microfabrication II, Austin, TX, USA},
  language = {en},
}