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The Local Structural Characterization of the Inactive Clusters in B, BF2 and BF3 Implanted Si Wafers Using X-ray Techniques

Published

Author(s)

M A. Sahiner, D F. Downey, S W. Novak, Joseph Woicik, D A. Arena
Citation
Microelectronics Journal
Volume
36

Citation

Sahiner, M. , Downey, D. , Novak, S. , Woicik, J. and Arena, D. (2005), The Local Structural Characterization of the Inactive Clusters in B, BF2 and BF3 Implanted Si Wafers Using X-ray Techniques, Microelectronics Journal, [online], https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=854278 (Accessed May 26, 2024)

Issues

If you have any questions about this publication or are having problems accessing it, please contact reflib@nist.gov.

Created June 30, 2005, Updated October 12, 2021