Sahiner, M.
, Downey, D.
, Novak, S.
, Woicik, J.
and Arena, D.
(2005),
The Local Structural Characterization of the Inactive Clusters in B, BF2 and BF3 Implanted Si Wafers Using X-ray Techniques, Microelectronics Journal, [online], https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=854278
(Accessed April 19, 2024)
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The Local Structural Characterization of the Inactive Clusters in B, BF2 and BF3 Implanted Si Wafers Using X-ray Techniques
Published
Author(s)
M A. Sahiner, D F. Downey, S W. Novak, , D A. Arena
Citation
Microelectronics Journal
Volume
36
Pub Type
Journals
Download Paper
Citation
Created June 30, 2005, Updated October 12, 2021