@article{783406,
  author = {M Sahiner and D Downey and S Novak and Joseph Woicik and D Arena},
  title = {The Local Structural Characterization of the Inactive Clusters in B, BF2 and BF3 Implanted Si Wafers Using X-ray Techniques},
  year = {2005},
  number = {36},
  month = {2005-07-01 00:07:00},
  publisher = {Microelectronics Journal},
  url = {https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=854278},
  language = {en},
}