TY  - JOUR
AU  - M Sahiner
AU  - D Downey
AU  - S Novak
AU  - Joseph Woicik
AU  - D Arena
C2  - Microelectronics Journal
DA  - 2005-07-01 00:07:00
LA  - en
M1  - 36
PB  - Microelectronics Journal
PY  - 2005
TI  - The Local Structural Characterization of the Inactive Clusters in B, BF2 and BF3 Implanted Si Wafers Using X-ray Techniques
UR  - https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=854278
ER  -