Slaughter, J.
, Kearney, D.
, Schulze, C.
, Falco, C.
, Hills, C.
, Saloman, E.
and Watts, R.
(1991),
Interfaces in Mo/Si Multilayers, ed. by R.B. Hoover and A.B.C. Walker Jr., Polarimetry and Projection Lithography Meeting , San Diego, CA, USA
(Accessed April 24, 2024)
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Interfaces in Mo/Si Multilayers, ed. by R.B. Hoover and A.B.C. Walker Jr.
Published
Author(s)
J M. Slaughter, D W. Kearney, C M. Schulze, C R. Falco, C R. Hills, ,
Proceedings Title
Polarimetry and Projection Lithography Meeting
Conference Dates
July 9-13, 1990
Conference Location
San Diego, CA, USA
Conference Title
Proc. SPIE 1343 Optics for Astronomy, Microscopy, Polarimetry and Projection Lithography Meeting
Pub Type
Conferences
Citation
Created December 31, 1990, Updated October 12, 2021