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Interfaces in Mo/Si Multilayers, ed. by R.B. Hoover and A.B.C. Walker Jr.

Published

Author(s)

J M. Slaughter, D W. Kearney, C M. Schulze, C R. Falco, C R. Hills, Edward B. Saloman, R N. Watts
Proceedings Title
Polarimetry and Projection Lithography Meeting
Conference Dates
July 9-13, 1990
Conference Location
San Diego, CA, USA
Conference Title
Proc. SPIE 1343 Optics for Astronomy, Microscopy, Polarimetry and Projection Lithography Meeting

Citation

Slaughter, J. , Kearney, D. , Schulze, C. , Falco, C. , Hills, C. , Saloman, E. and Watts, R. (1991), Interfaces in Mo/Si Multilayers, ed. by R.B. Hoover and A.B.C. Walker Jr., Polarimetry and Projection Lithography Meeting , San Diego, CA, USA (Accessed April 20, 2024)
Created December 31, 1990, Updated October 12, 2021