NOTICE: Due to a lapse in annual appropriations, most of this website is not being updated. Learn more.

Form submissions will still be accepted but will not receive responses at this time. Sections of this site for programs using non-appropriated funds (such as NVLAP) or those that are excepted from the shutdown (such as CHIPS and NVD) will continue to be updated.

U.S. flag

An official website of the United States government

Official websites use .gov
A .gov website belongs to an official government organization in the United States.

Secure .gov websites use HTTPS
A lock ( ) or https:// means you’ve safely connected to the .gov website. Share sensitive information only on official, secure websites.

PUBLICATIONS

Interfaces in Mo/Si Multilayers, ed. by R.B. Hoover and A.B.C. Walker Jr.

Published

Author(s)

J M. Slaughter, D W. Kearney, C M. Schulze, C R. Falco, C R. Hills, Edward B. Saloman, R N. Watts
Proceedings Title
Polarimetry and Projection Lithography Meeting
Conference Dates
July 9-13, 1990
Conference Location
San Diego, CA, USA
Conference Title
Proc. SPIE 1343 Optics for Astronomy, Microscopy, Polarimetry and Projection Lithography Meeting
Pub Type
Conferences

Citation

Slaughter, J. , Kearney, D. , Schulze, C. , Falco, C. , Hills, C. , Saloman, E. and Watts, R. (1991), Interfaces in Mo/Si Multilayers, ed. by R.B. Hoover and A.B.C. Walker Jr., Polarimetry and Projection Lithography Meeting , San Diego, CA, USA (Accessed November 5, 2025)

Issues

If you have any questions about this publication or are having problems accessing it, please contact [email protected].

Created December 31, 1990, Updated October 12, 2021
Was this page helpful?