@conference{784911,
  author = {J Slaughter and D Kearney and C Schulze and C Falco and C Hills and Edward Saloman and R Watts},
  title = {Interfaces in Mo/Si Multilayers, ed. by R.B. Hoover and A.B.C. Walker Jr.},
  year = {1991},
  month = {1991-01-01 00:01:00},
  publisher = {Polarimetry and Projection Lithography Meeting , San Diego, CA, USA},
  language = {en},
}