TY  - CONF
AU  - J Slaughter
AU  - D Kearney
AU  - C Schulze
AU  - C Falco
AU  - C Hills
AU  - Edward Saloman
AU  - R Watts
C2  - Polarimetry and Projection Lithography Meeting , San Diego, CA, USA
DA  - 1991-01-01 00:01:00
LA  - en
PB  - Polarimetry and Projection Lithography Meeting , San Diego, CA, USA
PY  - 1991
TI  - Interfaces in Mo/Si Multilayers, ed. by R.B. Hoover and A.B.C. Walker Jr.
ER  -