Villarrubia, J.
, Dixon, R.
, Jones, S.
, Lowney, J.
, Postek, M.
, Allen, R.
and Cresswell, M.
(1999),
Intercomparison of SEM, AFM, and Electrical Linewidths, Proc. Intl. Soc. for Optical Engineering (SPIE)Integrated Circuit Metrology, Inspection, and Process Control XIII, Santa Clara, CA, USA
(Accessed May 3, 2025)
Official websites use .gov
A .gov website belongs to an official government organization in the United States.
Secure .gov websites use HTTPS
A lock (
) or https:// means you’ve safely connected to the .gov website. Share sensitive information only on official, secure websites.
Intercomparison of SEM, AFM, and Electrical Linewidths
Published
Author(s)
, R. Dixon, S. Jones, , , ,
Proceedings Title
Proc. Intl. Soc. for Optical Engineering (SPIE)Integrated Circuit Metrology, Inspection, and Process Control XIII
Volume
3677
Conference Dates
March 14-19, 1999
Conference Location
Santa Clara, CA, USA
Pub Type
Conferences
Citation
Issues
If you have any questions about this publication or are having problems accessing it, please contact reflib@nist.gov.
Created August 31, 1999, Updated October 12, 2021