Villarrubia, J.
, Dixon, R.
, Jones, S.
, Lowney, J.
, Postek, M.
, Allen, R.
and Cresswell, M.
(1999),
Intercomparison of SEM, AFM, and Electrical Linewidths, Proc. Intl. Soc. for Optical Engineering (SPIE)Integrated Circuit Metrology, Inspection, and Process Control XIII, Santa Clara, CA, USA
(Accessed May 29, 2023)
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Intercomparison of SEM, AFM, and Electrical Linewidths
Published
Author(s)
, R. Dixon, S. Jones, , , ,
Proceedings Title
Proc. Intl. Soc. for Optical Engineering (SPIE)Integrated Circuit Metrology, Inspection, and Process Control XIII
Volume
3677
Conference Dates
March 14-19, 1999
Conference Location
Santa Clara, CA, USA
Pub Type
Conferences
Citation
Created August 31, 1999, Updated October 12, 2021