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Intercomparison of SEM, AFM, and Electrical Linewidths

Published

Author(s)

John S. Villarrubia, R. Dixon, S. Jones, J R. Lowney, Michael T. Postek, Richard A. Allen, Michael W. Cresswell
Proceedings Title
Proc. Intl. Soc. for Optical Engineering (SPIE)Integrated Circuit Metrology, Inspection, and Process Control XIII
Volume
3677
Conference Dates
March 14-19, 1999
Conference Location
Santa Clara, CA, USA

Citation

Villarrubia, J. , Dixon, R. , Jones, S. , Lowney, J. , Postek, M. , Allen, R. and Cresswell, M. (1999), Intercomparison of SEM, AFM, and Electrical Linewidths, Proc. Intl. Soc. for Optical Engineering (SPIE)Integrated Circuit Metrology, Inspection, and Process Control XIII, Santa Clara, CA, USA (Accessed May 27, 2024)

Issues

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Created August 31, 1999, Updated October 12, 2021