@conference{753801,
  author = {John Villarrubia and R. Dixon and S. Jones and J Lowney and Michael Postek and Richard Allen and Michael Cresswell},
  title = {Intercomparison of SEM, AFM, and Electrical Linewidths},
  year = {1999},
  number = {3677},
  month = {1999-09-01 00:09:00},
  publisher = {Proc. Intl. Soc. for Optical Engineering (SPIE)Integrated Circuit Metrology, Inspection, and Process Control XIII, Santa Clara, CA, USA},
  language = {en},
}