TY - CONF AU - John Villarrubia AU - R. Dixon AU - S. Jones AU - J Lowney AU - Michael Postek AU - Richard Allen AU - Michael Cresswell C2 - Proc. Intl. Soc. for Optical Engineering (SPIE)Integrated Circuit Metrology, Inspection, and Process Control XIII, Santa Clara, CA, USA DA - 1999-09-01 00:09:00 LA - en M1 - 3677 PB - Proc. Intl. Soc. for Optical Engineering (SPIE)Integrated Circuit Metrology, Inspection, and Process Control XIII, Santa Clara, CA, USA PY - 1999 TI - Intercomparison of SEM, AFM, and Electrical Linewidths ER -