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Integrated silicon optomechanical transducers and their application in atomic force microscopy

Published

Author(s)

Jie J. Zou, Marcelo I. Davanco, Yuxiang Liu, Thomas Michels, Kartik A. Srinivasan, Vladimir A. Aksyuk
Citation
Nanocantilever Beams: Modeling, Fabrication and Applications
Publisher Info
CRC Press, Taylor & Francis, Boca Raton, FL

Citation

Zou, J. , Davanco, M. , Liu, Y. , Michels, T. , Srinivasan, K. and Aksyuk, V. (2015), Integrated silicon optomechanical transducers and their application in atomic force microscopy, CRC Press, Taylor & Francis, Boca Raton, FL, [online], https://doi.org/10.1364/CLEO_SI.2014.SF2M.7 (Accessed February 23, 2024)
Created July 31, 2015, Updated November 10, 2018