Zou, J.
, Davanco, M.
, Liu, Y.
, Michels, T.
, Srinivasan, K.
and Aksyuk, V.
(2015),
Integrated silicon optomechanical transducers and their application in atomic force microscopy, CRC Press, Taylor & Francis, Boca Raton, FL, [online], https://doi.org/10.1364/CLEO_SI.2014.SF2M.7
(Accessed October 14, 2024)