@book{2556,
  author = {Jie Zou and Marcelo Davanco and Yuxiang Liu and Thomas Michels and Kartik Srinivasan and Vladimir Aksyuk},
  title = {Integrated silicon optomechanical transducers and their application in atomic force microscopy},
  year = {2015},
  month = {2015-07-31},
  publisher = {CRC Press, Taylor & Francis, Boca Raton, FL},
  doi = {https://doi.org/10.1364/CLEO_SI.2014.SF2M.7},
  language = {en},
}