TY - SER AU - Jie Zou AU - Marcelo Davanco AU - Yuxiang Liu AU - Thomas Michels AU - Kartik Srinivasan AU - Vladimir Aksyuk C2 - CRC Press, Taylor & Francis, Boca Raton, FL DA - 2015-07-31 DO - https://doi.org/10.1364/CLEO_SI.2014.SF2M.7 LA - en PB - CRC Press, Taylor & Francis, Boca Raton, FL PY - 2015 TI - Integrated silicon optomechanical transducers and their application in atomic force microscopy ER -