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Improvements to the NIST/DARPA EUV Reflectometry Facility

Published

Author(s)

Charles S. Tarrio, Thomas B. Lucatorto, S Grantham, M B. Squires, Uwe Arp, Lu Deng
Proceedings Title
Soft X-Ray and UV Imaging II
Volume
4506
Conference Dates
July 31, 2001
Conference Location
San Diego, CA
Conference Title
Proc. SPIE 4506

Citation

Tarrio, C. , Lucatorto, T. , Grantham, S. , Squires, M. , Arp, U. and Deng, L. (2001), Improvements to the NIST/DARPA EUV Reflectometry Facility, Soft X-Ray and UV Imaging II , San Diego, CA (Accessed June 14, 2024)

Issues

If you have any questions about this publication or are having problems accessing it, please contact reflib@nist.gov.

Created January 1, 2001, Updated February 17, 2017