@conference{148366,
  author = {Charles Tarrio and Thomas Lucatorto and S Grantham and M Squires and Uwe Arp and Lu Deng},
  title = {Improvements to the NIST/DARPA EUV Reflectometry Facility},
  year = {2001},
  number = {4506},
  month = {2001-01-01},
  publisher = {Soft X-Ray and UV Imaging II , San Diego, CA},
  language = {en},
}