TY  - CONF
AU  - Charles Tarrio
AU  - Thomas Lucatorto
AU  - S Grantham
AU  - M Squires
AU  - Uwe Arp
AU  - Lu Deng
C2  - Soft X-Ray and UV Imaging II , San Diego, CA
DA  - 2001-01-01
LA  - en
M1  - 4506
PB  - Soft X-Ray and UV Imaging II , San Diego, CA
PY  - 2001
TI  - Improvements to the NIST/DARPA EUV Reflectometry Facility
ER  -