Recent advances in the development of high peak brightness table-top extreme ultraviolet (EUV) and soft x-ray (SRX) lasers have opened new opportunities for the demonstration of compact full-field EUV/SXR microscopes capable of capturing images with short exposures down to a single laser shot. We demonstrate the practical application of tabletop zone plate EUV microscopes that can image nanostructures with a spatial resolution of 54 nm and below and exposure times as short as 1.2 ns, the duration of a single laser shot.
Citation: Journal of Physics Conference Proceedings
Pub Type: Journals
GaN nanowires, nano-mechanics, nano-mechanical resonators, electro-mechanical resonators, piezoresistivity