TY - JOUR AU - Norman Sanford AU - F Brizuela AU - Kristine Bertness C2 - Journal of Physics Conference Proceedings DA - 2008-07-21 LA - en M1 - 86 PB - Journal of Physics Conference Proceedings PY - 2008 TI - High resolution full-field imaging of nanostructures using compact extreme ultraviolet lasers UR - https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=908697 ER -