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Generic Technology, Measurement and Standards Issues in Micromachining and Microfabrication
Published
Author(s)
Dennis A. Swyt
Abstract
Microelectromechanical systems (MEMS) are integrally-fabricated hybrids of micromechanical and microelectronic elements which serve together as sensors, actuators, or both. While there are proprietary issues in MEMS products currently in or near commercial production, there are also a number of generic technology, measurement, and standards issues which may be addressed.
Proceedings Title
Proceedings of SPIE, Microlithography and Metrology in Micromachining, Michael T. Postek, Editor
Swyt, D.
(1995),
Generic Technology, Measurement and Standards Issues in Micromachining and Microfabrication, Proceedings of SPIE, Microlithography and Metrology in Micromachining, Michael T. Postek, Editor, Austin, TX
(Accessed December 4, 2024)