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Generic Technology, Measurement and Standards Issues in Micromachining and Microfabrication

Published

Author(s)

Dennis A. Swyt

Abstract

Microelectromechanical systems (MEMS) are integrally-fabricated hybrids of micromechanical and microelectronic elements which serve together as sensors, actuators, or both. While there are proprietary issues in MEMS products currently in or near commercial production, there are also a number of generic technology, measurement, and standards issues which may be addressed.
Proceedings Title
Proceedings of SPIE, Microlithography and Metrology in Micromachining, Michael T. Postek, Editor
Volume
2640
Conference Dates
October 23, 1995
Conference Location
Austin, TX
Conference Title
Micromachining Technology I

Keywords

bulk micromachining, fusion bonding, generic technology, LIGA, measurements, MEMS, microelectromechanical systems, microfabrication, micromachining, microsensors, silicon micromachining, standards, substrate bonding, surface micromachining

Citation

Swyt, D. (1995), Generic Technology, Measurement and Standards Issues in Micromachining and Microfabrication, Proceedings of SPIE, Microlithography and Metrology in Micromachining, Michael T. Postek, Editor, Austin, TX (Accessed April 12, 2024)
Created September 1, 1995, Updated February 19, 2017