@conference{190221,
  author = {Dennis Swyt},
  title = {Generic Technology, Measurement and Standards Issues in Micromachining and Microfabrication},
  year = {1995},
  number = {2640},
  month = {1995-09-01},
  publisher = {Proceedings of SPIE, Microlithography and Metrology in Micromachining, Michael T. Postek, Editor, Austin, TX},
  language = {en},
}