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Etching and Annealing of Substrates for Superconducting Multilayers and Devices

Published

Author(s)

Ronald H. Ono, James A. Beall, Leila R. Vale, David A. Rudman, S. J. Berkowitz, E. I. DeObaldia, M. L. Galloway, G. Morales, K. F. Ludwig, P. M. Mankiewich, W. J. Skocpol
Citation
IEEE Transactions on Applied Superconductivity
Volume
3
Issue
1

Citation

Ono, R. , Beall, J. , Vale, L. , Rudman, D. , Berkowitz, S. , DeObaldia, E. , Galloway, M. , Morales, G. , Ludwig, K. , Mankiewich, P. and Skocpol, W. (1993), Etching and Annealing of Substrates for Superconducting Multilayers and Devices, IEEE Transactions on Applied Superconductivity (Accessed March 29, 2024)
Created February 28, 1993, Updated October 12, 2021