@article{764856,
  author = {Ronald Ono and James Beall and Leila Vale and David Rudman and S. Berkowitz and E. DeObaldia and M. Galloway and G. Morales and K. Ludwig and P. Mankiewich and W. Skocpol},
  title = {Etching and Annealing of Substrates for Superconducting Multilayers and Devices},
  year = {1993},
  number = {3},
  month = {1993-03-01 00:03:00},
  publisher = {IEEE Transactions on Applied Superconductivity},
  language = {en},
}