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Electron Microscopy and Nanoscopy: Analytical

Published

Author(s)

Vladimir P. Oleshko

Abstract

The analytical electron microscope (AEM) is a transmission and/or scanning transmission electron microscope (S/TEM) which is modified to permit composition analyses using x-ray energy-dispersive spectroscopy (XEDS) and/or electron energy-loss spectroscopy (EELS) and energy-filtering TEM (EFTEM) as well as other analytical capabilities such as cathodoluminescence, holography, tomography, etc., in addition to its usual functions of imaging and diffraction. The versatility of AEM, combining high-resolution imaging, diffraction and powerful analytical facilities (e.g., spectroscopic imaging), the variety of signals and contrast effects available in the course of electron beam–specimen interactions, establish it as an outstanding characterization tool in many applications aimed for development of advanced nanotechnologies.
Citation
Elsevier Reference Module In Materials Science and Engineering

Keywords

AEM, CBED, CL, CTEM, EFTEM, EELS, holography, HRTEM, MSA, NBD, SAED, SI, STEM, XEDS, XWDS, tomography

Citation

Oleshko, V. (2016), Electron Microscopy and Nanoscopy: Analytical, Elsevier Reference Module In Materials Science and Engineering (Accessed April 12, 2024)
Created December 4, 2016, Updated March 21, 2017